Specific_Product_Header_Par2B_01_32

xml record "Specific_Product_Header_Par2B_01_32"
Specific Product Header for ALD Processing Parameters products

idfield namedefinition
0Sph_Descriptor
xml string
Specific Product Header descriptor
1Spare
xml string

hidden: true
2List_of_Dsds
xml record "List_of_Dsds"